Gallery of Cicada Photos from Costa Rica by Jose Mora, part 3.
More: Part 1, Part 2, Part 4, Part 5, Part 6.
These appear to be a cicada belonging to the genus Quesada, like Quesada gigas based on the yellow visible on the wings:

Molted cicada hardening its body:

Molted cicada hardening its body:

Adult cicada:

Adult cicada:

Adult cicada:

A cicada that got stuck molting and died:

A cicada that got stuck molting and died:

A cicada that got stuck molting and died:

A cicada that got stuck molting and died:

Adult cicada:

Adult cicada:
